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Thin film metrology and wafer inspection for defects are integral to controlling the semiconductor manufacturing process. Film properties, linewidths, and defect levels need to be measured, first to ...
The XYZ-Theta example stage shown is designed for thin film metrology equipped with direct drive motors, nanometer resolution encoders, and high-performance ACS motion controllers. More ...
Specifications important when considering thin film equipment include maximum diameter or width of the part to be processed, integral process controller, metrology or thin film monitoring capabilities ...
Advanced semiconductor processes have reached the 7 nm technology node and below; however, existing thin film thickness and critical dimension inspection technologies are reaching the detection limit.
We specialize in thin film solutions to help our customers achieve their goals. We utilize automated deposition equipment, customized thin film design and state of the art metrology equipment. At ...
Cardiff Diamond Foundry is a materials growth facility consisting of four Chemical Vapour deposition (CVD) systems, comprehensive thin film metrology and Chemical Mechanical Planarization (CMP). We ...
Using thin-film technology in nuclear clocks is commensurate ... Working with the JILA Keck Metrology laboratory and JILA instrument maker Kim Hagen, the researchers reliably reproduced films ...
After his postdoctoral research on laser desorption processes, he joined the R&D departments of several companies in the field of laser-based nanoparticle detection and thin film metrology for ...